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HERO Rail
hero-rail-rgv-cleanroom-fabmatics

Contact us!

Sales Team Europe

Phone: +49 351 65237-215


E-Mail


Sales Team USA

Phone: +1 315 316 1480


E-Mail


Sales Contact Japan

Phone: +81 92 473 6455


E-Mail


Sales Contact Singapur & Malaysia

Phone: +65 91 06 2386


E-Mail


Sales Contact Taiwan & China

Phone: +886 91 253 1863


E-Mail


More products

hero-rail-rgv-cleanroom-fabmatics

HERO Rail

Rail-guided transport and automated handling system for wafer cassettes

HERO Rail

CAN bus–enabled LF RFID reader with an integrated antenna and an integrated placement sensor.

RFID Reader LF-134-CAN-ANT

CAN bus–enabled LF RFID reader with antenna and placement sensor, designed for scalable retrofit of shelves, stockers, and conveyors.

RFID Reader LF-134-CAN-ANT

Compact LF RFID Reader LF 134 SER MINI for automated semiconductor manufacturing

RFID Reader LF-134-SER-MINI

Our smallest LF identification device for space‑restricted semiconductor manufacturing and material‑handling environments.

RFID Reader LF-134-SER-MINI

Automated Box Opening Transfer Unit opening HA200 boxes on the conveyor in 200 mm semiconductor fabs

Box Opening Transfer Unit

Enabling automation for box-driven fabs

Box Opening Transfer Unit

RFID Reader LF-134-ETH-MUX4

RFID Reader LF-134-ETH-MUX4

Spend less, connect more with our RFID multiplex solution supporting up to four antennas and four sensors

RFID Reader LF-134-ETH-MUX4

HERO Scout Reticle Transport and Handling

HERO Scout

Mobile robot for the most flexible and safe reticle transport and handling

HERO Scout

Test Wafer Center in the cleanroom

Test Wafer Center

All-in-one-solution for the automated management of test wafers

Test Wafer Center

Advanced mobile robot for transportation and handling of reticle pods

HERO Scout

Mobile robot for flexible and safe reticle transport and handling

HERO Scout

Cube Stocker

CubeStocker

Floor-based, automatic storage system with its own cleanroom atmosphere

CubeStocker

The HERO ® FAB 200 with four buffers for SMIF pods

HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

HERO®FAB

FAB-LIPS

FAB-LIPS

Real-time locating system for indoor positioning of batches in semiconductor factories

FAB-LIPS

lagerung-wafer-carrier-box_web

RFID Applications

Our sample applications for an efficiency-increasing use of RFID solutions

RFID Applications

Three RFID antennas for automated product identification in clean rooms.

RFID Accessories

Components for expanding and modernizing your existing RFID system

RFID Accessories

RFID reading station

RFID Reading Station

Identification of wafer cassettes, boxes and other types of material carriers

RFID Reading Station

Front view of Fabmatics RFID CAN Gateway with CAN, Ethernet, RS232, USB and HDMI interfaces

RFID Gateway CAN2WEB

Reliable connection between the CAN bus devices and your own network

RFID Gateway CAN2WEB

RFID Reader HF-1356-SER

RFID Reader HF-1356-SER

With serial interface for easy connection with almost every type of production equipment

RFID Reader HF-1356-SER

RFID Reader HF-1356-CAN

RFID Reader HF-1356-CAN

High frequency expert for bulk reading of large amounts of data at high speed

RFID Reader HF-1356-CAN

RFID reader LF-134-SER

RFID Reader LF-134-SER

The serial interface is able to connect to practically any production equipment

RFID Reader LF-134-SER

RFID Reader LF-134-CAN

RFID Reader LF-134-CAN

The integrated CAN bus interface enables simple networking between multiple devices

RFID Reader LF-134-CAN

ZFS Advanced Purge Nest Unit (APNU) for Spectra / A300 FOUP.

Wafer Pod Purge System

Retrofittable Purge System reliably protects wafers between process steps

Wafer Pod Purge System

RFID shelf for semiconductor industry to store carrier boxes

RFID Rack

Products will be identified when placed and become subsequently traceable stored

RFID Rack

Zero Footprint Storage

ZFS (Conveyor)

Space-saving storage underneith the cleanroom ceiling with Zero Footprint Storage from Fabmatics

ZFS (Conveyor)

FlatStocker installation with storage bins

FlatStocker

Storage of material carriers where floor space is limited

FlatStocker

Slim Load Port for manual FOUP access in semiconductor fab

Slim Load Port

Slim input/output station for manual access at any location of the factory

Slim Load Port

Smart Load Port

Smart Load Port

Input/Output station with two ports and operator GUI for manual access

Smart Load Port

Roller conveyor with turntables and lifts for wafer transport on two levels

Conveyor System for Cleanroom Production

Automated conveyor system for clean rooms.

Conveyor System for Cleanroom Production

RFID trolley for the cleanroom

RFID Trolley

Ideal logistics solution for fab areas where automatic transport is not possible or necessary

RFID Trolley

hero-rail-rgv-cleanroom-fabmatics

HERO Rail

Rail-guided transport and automated handling system for wafer cassettes

HERO Rail

The HERO ® FAB 200 with four buffers for SMIF pods

HERO Fab

Mobile robot system for quick transport and automatic handling of wafer cassettes

HERO Fab

FOUP Opener

FOUPopener

Manual instrument to open and lock 300mm FOUPs with two hands

FOUPopener

Reticle Gripper

Reticle Gripper

Gripper for safe and reliable handling of individual photomasks

Reticle Gripper

Active Mask Gripper in the Cleanroom

EUV-Reticle-Handling

High cleanroom quality for EUV-Lithography reticle handling by Fabmatics

EUV-Reticle-Handling

Wafergripper 450mm

Wafer Gripper, 100 to 450 mm

Gripper system for automated handling of single wafers in various sizes

Wafer Gripper, 100 to 450 mm

Carriergripper 200

Carrier Gripper

Automated carrier handling system enables handling on existing tools

Carrier Gripper

LUNA - Classic robotic cell for automated machine loading and unloading of carriers

ACH-LUNA

Classic robotic cell for automated machine loading and unloading of carriers

ACH-LUNA



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