Start - Fabmatics: Semiconductor Manufacturing Automation

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Fabmatics GmbH is celebrating 30 years of automation in the semiconductor industry and other high-tech sectors. On May 6, 1991, the founding of HAP GmbH Dresden laid the foundation for today’s Fabmatics.
30 Years of Automation

Connect
your
potential.

A first-class conductor can lead every ensemble to new heights.

This also applies to your production lines. In combination with complementary components, they run at top form. We ensure the right pace.
With powerful material flow automation for chip factories and plant manufacturers. Our Solutions

We are hiring! Visit our career site >>>

Connect
your
potential.

Automated material handling solutions for semiconductor factories and equipment manufacturers.

As a factory manager you are responsible for running production efficiently.

For more profit

Benefits for factory managers

As a project manager you must implement automation projects in due time, at defined costs and in best quality.

For less stress

Benefits for project managers

As an equipment manufacturer you are the specialist for developing new systems.

For more innovation

Benefits for equipment suppliers

Connect
your
potential.

Our instruments for a
perfectly harmonizing orchestra.

Mobile Robot HERO FAB SMIF Pod

HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

SCOUT mobile robot SCOUTtriax & SCOUTactive

SCOUT

Autonomously navigating vehicle as the flexible alternative to fixed installed transport systems

FAB-LIPS

FAB-LIPS

Real-time locating system for indoor positioning of batches in semiconductor factories

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RFID Applications

Our sample applications for an efficiency-increasing use of RFID solutions

Three RFID antennas for automated product identification in clean rooms.

RFID Accessories

Components for expanding and modernizing your existing RFID system

RFID reading station

RFID Reading Station

Identification of wafer cassettes, boxes and other types of material carriers

RFID CAN/ETH gatewaý in three versions.

RFID Gateway CAN2WEB

Reliable connection between the CAN bus devices and your own network

RFID Reader HF-1356-SER

RFID Reader HF-1356-SER

With serial interface for easy connection with almost every type of production equipment

RFID Reader HF-1356-CAN

RFID Reader HF-1356-CAN

High frequency expert for bulk reading of large amounts of data at high speed

RFID reader LF-134-SER

RFID Reader LF-134-SER

The serial interface is able to connect to practically any production equipment

RFID Reader LF-134-CAN

RFID Reader LF-134-CAN

The integrated CAN bus interface enables simple networking between multiple devices

ZFS Advanced Purge Nest Unit (APNU) for Spectra / A300 FOUP.

FOUP Purge System

Retrofittable Purge System reliably protects wafers between process steps

RFID shelf for semiconductor industry to store carrier boxes

RFID Rack

Products will be identified when placed and become subsequently traceable stored

Zero Footprint Storage

ZFS (Conveyor)

Space-saving storage underneith the cleanroom ceiling with Zero Footprint Storage from Fabmatics

FlatStocker installation with storage bins

FlatStocker

Storage of material carriers where floor space is limited

Slim Purge Load Port

Slim Purge Load Port

Flexible input/output station for manual access with purge functionality

Fabmatics GmbH

Slim Load Port

Slim input/output station for manual access at any location of the factory

Smart Load Port

Smart Load Port

Input/Output station with two ports and operator GUI for manual access

Roller conveyor with turntables and lifts for wafer transport on two levels

Conveyor system

Automated conveyor system for clean rooms.

RFID trolley for the cleanroom

RFID trolley

Ideal logistics solution for fab areas where automatic transport is not possible or necessary

Smart Cart

Smart Cart

Battery-operated cleanroom transport trolley with maximum agility and high load capacity

Rail guided robot HERO Rail in operation at Infineon Dresden

HERO®Rail

Rail-guided transport and automated handling system for wafer cassettes

HERO FAB 200 with 4 buffer postions for SMIF pods

HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

Mobile Robot SCOUT® active

SCOUT®

Autonomously navigating mobile robot as the flexible alternative to permanently installed transport systems

FOUP Opener

FOUPopener

Manual instrument to open and lock 300mm FOUPs with two hands

Reticle Gripper

Reticle Gripper

Gripper for safe and reliable handling of individual photomasks

EUV-Reticle-Handling

EUV-Reticle-Handling

High cleanroom quality for EUV-Lithography reticle handling by Fabmatics

EASYload with wafers loading a carrier

EASYLOAD

Loading and unloading system for 200mm Wafer Carrier and 300mm Wafer FOUPs

Wafergripper 450mm

Wafer Gripper, 100 to 450 mm

Gripper system for automated handling of single wafers in various sizes

Carriergripper 200

Carrier Gripper

Automated carrier handling system enables handling on existing tools

LUNA

ACH-LUNA

Classic robotic cell for automated machine loading and unloading of carriers

Connect
your
potential.

To be an excellent conductor requires extensive expertise and many years of experience.

Fabmatics is an experienced specialist for the automation of material flows and handling processes in the semiconductor industry and other high-tech production environments. Founded in 1991, the company has been successfully implementing customer-specific automation projects for customers in the semiconductor industry for more than 30 years, helping to make their production more efficient, faster and safer.

About Fabmatics

News

10.01.
2022

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No half-measures – Fabmatics and SICK are making mobile robots safe

Application report "Safe mobility in the clean room" from the SICK Sensor Blog

18.11.
2021

Fabmatics live at SEMICON West 2021

Join us at SEMICON West from December 7- 9, 2021. The event brings together the global microelectronics supply chain for a unique hybrid experience.

12.11.
2021

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Change of management at Fabmatics USA

Thomas Beeg succeeds Stan Rosenlof, who is retiring

Contact

Location Europe:
Dresden

Fabmatics GmbH
Zur Steinhöhe 1
01109 Dresden
Germany

Phone: +49 351 65237-0
Fax: +49 351 65237-190

To the contact form

Location USA:
Salt Lake City

Fabmatics USA Inc.
8410 South 700 East, Suite 100
Sandy, Utah 84070
USA

Phone: +1 801 7480476
Fax: +1 801 7480158

To the contact form