Connect
your
potential.

A great conductor creates perfect results. Each ensemble can be led to new top performances.









This also applies to your production lines. In combination with complementary components, they can reach their full potential. In order to do this, we provide automated material handling solutions for semiconductor factories and equipment suppliers. Our Solutions

Connect
your
potential.

Automated material handling solutions for semiconductor factories and equipment manufacturers.



As a factory manager you are responsible for running production efficiently.

For more profit

Benefits for factory managers

As a project manager you must implement automation projects in due time, at defined costs and in best quality.

For less stress

Benefits for project managers

As an equipment manufacturer you are the specialist for developing new systems.

For more innovation

Benefits for equipment suppliers

Connect
your
potential.

Our instruments for a
perfectly harmonizing orchestra.


Our Products



HERO® FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

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SCOUT mobile robot by Fabmatics

SCOUT

Autonomously navigating vehicle as the flexible alternative to fixed installed transport systems

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RFID rack storage place to identify carrier boxes

Applications

Our sample applications for an efficiency-increasing use of RFID solutions

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RFID Antennas

Accessories

Components for expanding and modernising your existing RFID system

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RFID reading station

Reading Station

Identification of wafer cassettes, boxes and other types of material carriers

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CAN2WEB

CAN2Web-A

Reliable connection between the CAN bus devices and your own network

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HF-SER

With serial interface for easy connecting with almost every type of production equipment

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HF-CAN

HF-CAN

High frequency expert for bulk reading of large amounts of data at high speed

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LF-134-SER

The serial interface is able to connect to practically any production equipment

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LF-134-CAN

LF-134-CAN

The integrated CAN bus interface enables simple networking between multiple devices

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FOUP Purge System

FOUP Purge System

Retrofittable Purge System reliably protects wafers between process steps

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RFID shelf for semiconductor industry to store carrier boxes

RFID Racks

Products will be identified when placed and become subsequently traceable stored

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Zero Footprint Storage

ZFS (Conveyor)

Space-saving storage underneith the cleanroom ceiling with Zero Footprint Storage from Fabmatics

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FlatStocker by Fabmatics

FlatStocker

Storage of material carriers e.g. wafer cassettes and H200 boxes where floor space is limited

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Slim Purge Load Port

Slim Purge Load Port

Flexible input/output station for manual access with purge functionality

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Slim Load Port

Slim input/output station for manual access at any location of the factory

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Smart Load Port

Smart Load Port

Input/Output station with two ports and operator GUI for manual access

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Cleanroom Conveyor System with lifts and turn tables

IntelliTrack

Roller conveyor system allows most diverse transport containers to be moved throughout the fab

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RFID trolley for the cleanroom

RFID Person Guided Vehicle

Ideal logistics solution for fab areas where automatic transport is not possible or necessary

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Smart Cart

Smart Cart

Battery-operated cleanroom transport trolley with maximum agility and high load capacity

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Automated Carrier Handling by mobile robot HERO

HERO®

Rail-guided transport and automated handling system for wafer cassettes

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HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

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SCOUT

Autonomously navigating vehicle as the flexible alternative to fixed installed transport systems

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FOUP Opener

FOUPopener

Manual instrument to open and lock 300mm FOUPs with two hands

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Reticle Gripper

Reticle Gripper

Gripper system for save automated handling of single reticle masks

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EUV-Reticle-Handling

EUV-Reticle-Handling

High cleanroom quality for EUV-Lithography reticle handling by Fabmatics

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EASYload

EASYLOAD / EASYLOAD300-200

Loading and unloading system for 200mm Wafer Carrier and 300mm Wafer FOUPs

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Wafergripper 450mm

Wafer Gripper, 100 to 450 mm

Gripper system for automated handling of single wafers in various sizes

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Carriergripper 200

Carrier Gripper

Automated carrier handling system enables handling on existing tools

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LUNA

ACH-LUNA

Classic robotic cell for automated machine loading and unloading of carriers

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Connect
your
potential.

To be an excellent conductor requires extensive expertise and many years of experience.


Fabmatics is an experienced specialist for the automation of material flows and handling processes in the semiconductor industry and other high-tech production environments. Fabmatics is the result of the merger of HAP GmbH Dresden and Roth & Rau - Ortner GmbH, which have been implementing customized automation projects for more than 20 years.


About Fabmatics

News

SemiconWest2019

Fabmatics at SEMICON West 2019

Complete, 100 percent identification of wafer batches is a necessary prerequisite for any material flow automation in semiconductor factories. As a supplier of integrated intralogistics solutions such as mobile robots, automated transport and [...]

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Logo futureSAX Saxon Innovation Award

TOP 10 – Fabmatics is nominated for the Innovation Award of Saxony 2019

The new SCOUT® is an autonomously navigating, mobile robot for flexible material transport in semiconductor factories. Due to its modular hardware & software design SCOUT® allows scaling in size, form and handling unit. Therefore the [...]

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Fabmatics at the Bonding Recruiting Fair in Dresden

From 8th to 10th of April 2019 the annual recruiting fair of bonding-studenteninitiave e.V. with about 200 exhibiting companies will take place at the Technical University Dresden (TU Dresden), Germany. Exhibitors from various industries will [...]

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Contact


Location Europe:
Dresden

Fabmatics GmbH
Zur Steinhöhe 1
01109 Dresden
Germany

Phone: +49 351 65237-0
Fax: +49 351 65237-190

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Location USA:
Salt Lake City

Fabmatics USA Inc.
8410 South 700 East, Suite 100
Sandy, Utah 84070
USA

Phone: +1 801 7480476
Fax: +1 801 7480158

To the contact form