Connect
your
potential.

A great conductor creates perfect results. Each ensemble can be led to new top performances.









Change of Management at Fabmatics. Click here for the news >>>

This also applies to your production lines. In combination with complementary components, they can reach their full potential. In order to do this, we provide automated material handling solutions for semiconductor factories and equipment suppliers. Our Solutions

Connect
your
potential.

Automated material handling solutions for semiconductor factories and equipment manufacturers.



As a factory manager you are responsible for running production efficiently.

For more profit

Benefits for factory managers

As a project manager you must implement automation projects in due time, at defined costs and in best quality.

For less stress

Benefits for project managers

As an equipment manufacturer you are the specialist for developing new systems.

For more innovation

Benefits for equipment suppliers

Connect
your
potential.

Our instruments for a
perfectly harmonizing orchestra.


Our Products



Mobile Robot HERO FAB SMIF Pod

HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

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SCOUT mobile robot SCOUTtriax & SCOUTactive

SCOUT

Autonomously navigating vehicle as the flexible alternative to fixed installed transport systems

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lagerung-wafer-carrier-box_web

RFID Applications

Our sample applications for an efficiency-increasing use of RFID solutions

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Three RFID antennas for automated product identification in clean rooms.

RFID Accessories

Components for expanding and modernizing your existing RFID system

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RFID reading station

RFID Reading Station

Identification of wafer cassettes, boxes and other types of material carriers

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RFID CAN/ETH gatewaý in three versions.

RFID Gateway CAN2WEB

Reliable connection between the CAN bus devices and your own network

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RFID Reader HF-1356-SER

RFID Reader HF-1356-SER

With serial interface for easy connection with almost every type of production equipment

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RFID Reader HF-1356-CAN

RFID Reader HF-1356-CAN

High frequency expert for bulk reading of large amounts of data at high speed

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RFID reader LF-134-SER

RFID Reader LF-134-SER

The serial interface is able to connect to practically any production equipment

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RFID Reader LF-134-CAN

RFID Reader LF-134-CAN

The integrated CAN bus interface enables simple networking between multiple devices

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ZFS Advanced Purge Nest Unit (APNU) for Spectra / A300 FOUP.

FOUP Purge System

Retrofittable Purge System reliably protects wafers between process steps

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RFID shelf for semiconductor industry to store carrier boxes

RFID Rack

Products will be identified when placed and become subsequently traceable stored

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Zero Footprint Storage

ZFS (Conveyor)

Space-saving storage underneith the cleanroom ceiling with Zero Footprint Storage from Fabmatics

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FlatStocker installation with storage bins

FlatStocker

Storage of material carriers where floor space is limited

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Slim Purge Load Port

Slim Purge Load Port

Flexible input/output station for manual access with purge functionality

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Fabmatics GmbH

Slim Load Port

Slim input/output station for manual access at any location of the factory

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Smart Load Port

Smart Load Port

Input/Output station with two ports and operator GUI for manual access

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Roller conveyor with turntables and lifts for wafer transport on two levels

Conveyor system

Automated conveyor system for clean rooms.

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RFID trolley for the cleanroom

RFID trolley

Ideal logistics solution for fab areas where automatic transport is not possible or necessary

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Smart Cart

Smart Cart

Battery-operated cleanroom transport trolley with maximum agility and high load capacity

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Rail guided robot HERO Rail in operation at Infineon Dresden

HERO®Rail

Rail-guided transport and automated handling system for wafer cassettes

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HERO FAB 200 with 4 buffer postions for SMIF pods

HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

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Mobile Robot SCOUT® active

SCOUT®

Autonomously navigating mobile robot as the flexible alternative to permanently installed transport systems

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FOUP Opener

FOUPopener

Manual instrument to open and lock 300mm FOUPs with two hands

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Reticle Gripper

Reticle Gripper

Gripper system for save automated handling of single reticle masks

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EUV-Reticle-Handling

EUV-Reticle-Handling

High cleanroom quality for EUV-Lithography reticle handling by Fabmatics

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EASYload with wafers loading a carrier

EASYLOAD

Loading and unloading system for 200mm Wafer Carrier and 300mm Wafer FOUPs

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Wafergripper 450mm

Wafer Gripper, 100 to 450 mm

Gripper system for automated handling of single wafers in various sizes

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Carriergripper 200

Carrier Gripper

Automated carrier handling system enables handling on existing tools

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LUNA

ACH-LUNA

Classic robotic cell for automated machine loading and unloading of carriers

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Connect
your
potential.

To be an excellent conductor requires extensive expertise and many years of experience.


Fabmatics is an experienced specialist for the automation of material flows and handling processes in the semiconductor industry and other high-tech production environments. Fabmatics is the result of the merger of HAP GmbH Dresden and Roth & Rau - Ortner GmbH, which have been implementing customized automation projects for more than 20 years.


About Fabmatics

News

SSIA Automation Supplier Day

Fabmatics presents at the SSIA Automation Supplier Day

On July 16 and 17, 2020, the Singapore Semiconductor Industry Association will hold its signature event – the annual Automation Supplier Day -  this time in virtual form. The aim of the event is to promote cooperation between local and foreign companies in Singapore's semiconductor ecosystem.

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Fabmatics at VIRTUAL SEMICON West 2020

One of the most important trade fair for the semiconductor industry will take place on July 20 – 23, 2020 as a virtual event for the first time – and Fabmatics will be part of it.

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Dr. Andreas Purath

Change of Managing Director at Fabmatics

Generation change at Fabmatics GmbH in Dresden (Germany): From August 1, 2020, Dr. Andreas Purath will be the new Managing Director of the company, which specializes in automation solutions for the semiconductor industry. Dr. Purath will succeed Heinz Martin Esser, who will retire on 31 October 2020. Before Heinz Martin Esser leaves Fabmatics, he will familiarize Dr. Purath with the tasks of his future area of responsibility in an intensive familiarization process.

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Contact


Location Europe:
Dresden

Fabmatics GmbH
Zur Steinhöhe 1
01109 Dresden
Germany

Phone: +49 351 65237-0
Fax: +49 351 65237-190

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Location USA:
Salt Lake City

Fabmatics USA Inc.
8410 South 700 East, Suite 100
Sandy, Utah 84070
USA

Phone: +1 801 7480476
Fax: +1 801 7480158

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