RFID as Missing Link
On wafer carriers, RFID turned out to be the most suitable way of batch identification. Fabmatics has developed a solution for retrofitting existing wafer carriers with RFID transponders.
Affixing the transponders was the biggest challenge. The solution, developed by Fabmatics, is ultrasonic welding. Fabmatics is welding the transponder to the carrier, hermetically sealed by a transponder holder. It then complies exactly with the design offered by the supplier. There is no geometric modification of the carrier in any way.Fabmatics creates a welding seam that results neither in surface, nor mechanical alterations.
The use of adhesives would result in evaporation and therefore contamination, leading to a loss of production goods. Using mechanical forms of attachment, like a clip, can lead to friction induced particle formation, making it unfeasible for clean room application.
With this cost-effective retrofit solution for wafer carriers with RFID tags by Fabmatics, mature semiconductor fabs are able to identify their products automatically and secure. RFID is a basic requirement for further automization of production and logistics processes.
Best Practice Example:
Case Study at Elmos Semiconductor AG in Dortmund