Overview of transport systems

Automated Guided Vehicle (AGV)

HERO FAB 200 with 4 buffer postions for SMIF pods

HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

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Mobile Robot SCOUT® active

SCOUT®

Autonomously navigating mobile robot as the flexible alternative to permanently installed transport systems

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Rail Guided Vehicle (RGV)

Automated Carrier Handling by mobile robot HERO

HERO®Rail

Rail-guided transport and automated handling system for wafer cassettes

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Person Guided Vehicle (PGV)

RFID trolley for the cleanroom

RFID trolley

Ideal logistics solution for fab areas where automatic transport is not possible or necessary

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Smart Cart

Smart Cart

Battery-operated cleanroom transport trolley with maximum agility and high load capacity

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Conveyor

Roller conveyor with turntables and lifts for wafer transport on two levels

Conveyor system

Automated conveyor system for clean rooms.

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Loadports

Smart Load Port

Smart Load Port

Input/Output station with two ports and operator GUI for manual access

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Fabmatics GmbH

Slim Load Port

Slim input/output station for manual access at any location of the factory

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Slim Purge Load Port

Slim Purge Load Port

Flexible input/output station for manual access with purge functionality

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