Reliably protect wafers. Secure yield in the long term.
Modern semiconductor processes are more sensitive than ever to environmental influences. While wafers wait between process steps in FOUPs or pods, even brief exposure to humidity, oxygen, or chemical molecules can lead to oxidation, surface damage, and yield losses.
Our purge solutions create a controlled, stable atmosphere for your intermediate storage and transport processes, actively protecting the value of each individual wafer.
The focus: maximum process reliability, maximum yield, and complete traceability.
Wafer Pod Purge System
Our retrofittable wafer pod purge systems create a controlled environment inside the pod and effectively protect wafers from contamination and unwanted reactions. Optimized for integration into existing systems – such as FOUP storage areas, ZFS, and stockers – they are flexible, efficient, and reliable.