LinearStocker: Automated Storage System for Semiconductor Fabs
The LinearStocker is a scalable automated storage system for decentralized storage and retrieval of wafer carriers, reticle pods, tools and customer-specific materials in cleanroom environments. Flexible I/O interfaces enable integration into automated material flows and existing production environments.
Challenge: Controlled Material Availability in the Cleanroom
Semiconductor fabs require materials to be available at the appropriate process step while maintaining cleanroom conditions. Wafer carriers, reticles and other sensitive materials also need to be stored and supplied with minimal manual handling.
The LinearStocker combines automated storage with different material transfer options. It can therefore serve as a decentralized material buffer between production areas and equipment. The storage system can also support sequencing and commissioning of production batches.
Flexible Storage Automation for 200mm and 300mm Fabs
The LinearStocker automates the storage and retrieval of wafer carriers, reticle pods, tools and other customer-specific materials in cleanroom environments. Supported carrier types include HA200, open cassettes, FOUP, FOSB and reticle pods. The configuration can be adapted to carrier type, required storage capacity and production environment.
The cleanroom-optimized design, featuring a passive gripper, inductive power transmission on the x-axis, and optional axes with vacuum capabilities, enables the storage of products in a cleanroom environment up to ISO Class 3.
Depending on the carrier type and application, single- or double-depth storage bins are possible. The configuration can be adapted to the required storage capacity and the available installation space.
Manual I/O ports and connections to OHT and conveyor systems provide flexible options for material transfer. SEMI-E88 MCS and SEMI-E84 Transfer interfaces support integration into the fab automation environment.
Inventory management is implemented with SWarePro. Statistics and inventory functions support the recording and documentation of current inventory levels.
Functions and Features of the LinearStocker
Flexible carrier support:
The LinearStocker can be configured for HA200, open cassettes, FOUP, FOSB, reticle pods and other customer-specific carriers, supporting different materials and manufacturing areas.
Scalable storage configuration:
Depending on the carrier type, single- or double-deep storage can be implemented to provide different storage capacities within the available footprint.
Flexible material transfer:
Manual I/O ports, OHT I/O connections and conveyor extensions support different material flow concepts. Connection to other equipment ports is also available.
Cleanroom-compatible design:
The LinearStocker is designed for cleanroom environments up to ISO Class 3. The existing product description identifies a passive gripper, inductive energy transfer to the X-axis and optional extraction of axes as design features.
Inventory management with SWarePro:
Statistics and inventory functions support recording and documentation of inventory levels.
Standardized automation interfaces:
SEMI-E88 MCS and SEMI-E84 Transfer support integration into semiconductor fab automation environments.
Benefits for Semiconductor Fabs
High storage density:
Single- and double-deep configurations provide variable storage capacities within a compact footprint.
Reduced manual handling:
Automated storage and retrieval reduces manual material movements.
Flexible integration:
Manual ports plus OHT, conveyor and equipment connections support different automation concepts.
Support for different carriers:
The storage system can be configured for different carrier and material types.
Storage under cleanroom conditions:
Configurations for environments up to ISO Class 3 support applications in sensitive semiconductor manufacturing areas.
Transparent inventory:
SWarePro supports recording and documentation of current inventory levels.
Applications of the LinearStocker
Decentralized intermediate storage:
Carriers and other materials can be stored automatically between production steps and retrieved when required.
Production batch sequencing:
The LinearStocker can be used for sequencing production batches within automated material flows.
Reticle storage:
A dedicated configuration supports automated storage and retrieval of different reticle pods, including Canon 6 inch, Nikon 6 inch, MRSP 150 mm and RSP 150 mm types documented in the current Reticle Product Sheet.
Automated material-flow integration:
OHT, conveyor and equipment connections enable integration with additional automation components.
Downloads:
LinearStocker Reticle Product Sheet *
[* SCI is now Fabmatics. These product documents were created before SCI's business operations were integrated into Fabmatics and may therefore still feature the previous SCI design. An update will be available shortly.]
