VarioStocker: Flexible Automated Storage System for Semiconductor Fabs
The VarioStocker is a flexible automated storage system for space-efficient wafer carrier storage and retrieval in semiconductor fabs. The automated storage system can be adapted to different fab layouts, storage capacities and carrier types.
With a configurable length of up to 15 m, single- or double-deep storage and multiple material transfer options, the VarioStocker combines high storage density with flexible use of available cleanroom space
High Storage Capacity within Limited Cleanroom Space
Semiconductor fabs face increasing requirements for material availability and automation while cleanroom floor space remains limited. Carriers must be stored under controlled conditions and reliably supplied to subsequent manufacturing processes.
The VarioStocker uses single- or double-deep storage to achieve high storage density. Its configuration can be adapted to the carrier type, available footprint and required storage capacity. Different installation configurations also enable efficient use of available cleanroom space.
Flexible Integration of the VarioStocker into Fab Automation
The VarioStocker automates carrier storage and retrieval. Supported carrier types include HA200, FOUP, FOSB and SMIF as well as additional customer-specific carrier types. The automated storage system is specified for cleanroom environments up to ISO Class 5 according to ISO 14644.
Material transfer options include manual ports, OHT I/O connections, conveyor extensions, equipment ports and docking stations for batch transport carts. SEMI E88 MCS and SEMI E84 Transfer interfaces support integration into fab automation. Inventory management is handled by SWarePro, with Siemens TIA and SIMATIC WinCC Unified specified as the control platform.
For applications with high availability and productivity requirements, an optional second autonomous handler can be integrated to provide additional redundancy. Purge functionality can be integrated from the outset or added later.
VarioStocker Functions and Features
Variable dimensions and installation:
With a configurable length of up to 15 m, the VarioStocker adapts to different room sizes and fab layouts. Up to two sides of the automated storage system can be positioned directly against existing cleanroom walls. With end-face integration, configurations with up to three sides positioned against cleanroom walls are possible. This enables efficient use of available cleanroom space.
High storage density:
Single- and double-deep storage configurations provide a high number of storage locations within a compact footprint. Storage capacity is configured according to carrier type and system configuration.
Support for different carrier types:
The VarioStocker supports HA200, FOUP, FOSB, SMIF and additional customer-specific carrier types.
Configurable material transfer:
Manual ports, OHT I/O connections, conveyor extensions, equipment ports and docking stations enable integration into different material flow concepts.
Redundant material handling:
An optional second autonomous handler increases the availability of the automated storage system.
Cleanroom-compatible storage:
The VarioStocker is specified for cleanroom environments up to ISO Class 5 according to ISO 14644.
Standardized automation interfaces:
SEMI E88 MCS and SEMI E84 Transfer support integration into fab automation.
Inventory management with SWarePro:
SWarePro provides inventory management for the automated storage system
Benefits of the VarioStocker for Semiconductor Fabs
Low total cost of ownership:
The VarioStocker is designed for low total cost of ownership (TCO). A requirements-based configuration, high storage density and modular design support cost-efficient operation throughout the lifecycle of the automated storage system. The VarioStocker combines a requirements-based configuration, high storage density and modular design to support a low total cost of ownership (TCO).
High availability:
The VarioStocker is designed for maximum uptime. An optional second autonomous handler provides additional redundancy for applications with high availability requirements.
High space efficiency:
Single- or double-deep storage configurations provide high storage density within a compact cleanroom footprint.
High flexibility in system planning:
Variable dimensions, different storage configurations and multiple material transfer options enable adaptation to carrier type, storage capacity, fab layout and customer-specific requirements.
Vibration-free transport:
The VarioStocker provides vibration-free carrier transport within the automated storage system, supporting controlled material handling.
Fast installation and commissioning:
The modular design supports fast installation and commissioning of the VarioStocker in the semiconductor fab.
Virtual commissioning:
Virtual commissioning at the manufacturer's site with customer connectivity enables system functions to be validated before on-site installation.
Downloads:
[* SCI ist jetzt Fabmatics. Diese Produktunterlagen wurden vor der Integration der Geschäftsaktivitäten der SCI in Fabmatics erstellt und können daher noch das bisherige SCI-Design enthalten. Ein Update erfolgt in Kürze.]
Would you like to explore how the VarioStocker can be integrated into your automated material flow?
Fabmatics will help you select the right configuration for carrier type, storage capacity, cleanroom requirements, fab layout, and system integration.
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