The flexible space saver for manual access

Normally, manual access to production lots in highly automated chip factories involves long waiting times because the FOUPs often need to be moved from storage areas on the periphery of the production area beforehand. Slim Load Ports provide manual access to the FOUPs exactly where it is needed, namely wherever the operator requires it for his work.Slim Load Ports are compact, flexible stations that may be placed at any location in a fab to ensure short or long-term manual OHT input and output, e.g. for short-term tests or measurements or in case of OHT interruptions. In order to enable simple manual access to lots from anywhere, at any time, the Slim Load Ports may also be installed preventatively at every production line. Tool simulation for the OHT with the help of Slim Load Ports is also possible.



Slender design and light weight

  • Fast and easy installation
  • Easy to move
  • Small footprint

SEMI standard conformant

  • Works with every OHT
  • Maintains FOUP distances according to the SEMI standard (505 mm) when the load ports are chained “edge-to-edge


  • Simple MES/MCS interface
  • Built-in RFID reader (134.2 kHz)
  • Built-in SEMI E84 interface for handshake between Slim LP and OHT vehicle