FlatStocker – Automated Zero Footprint Storage Solution for Semiconductor Fabs

The FlatStocker from Fabmatics is a ceiling-mounted automation system for storing 200 mm wafer carriers in cleanroom environments (e.g. HA 200 boxes, open cassettes, or SMIF pods). It was developed for semiconductor fabs that need to preserve valuable cleanroom floor space. The system relocates WIP storage capacity beneath the cleanroom ceiling and enables fast, automated access to wafer lots.

When Cleanroom Space Becomes a Limiting Factor

In 200mm semiconductor fabs, cleanroom floor space is limited and cost-intensive. Conventional floor-based storage systems directly compete with process equipment for available space. At the same time, the demand for flexible, traceable WIP handling with direct connection to transport and host systems is increasing. A space-efficient, scalable storage system is therefore required, without disrupting existing production operations.

Space‑Efficient Storage Above the Cleanroom Floor with the FlatStocker

The FlatStocker is an automated storage system designed for space-efficient storage of product carriers such as open wafer cassettes, HA‑200 boxes, or SMIF pods beneath the cleanroom ceiling. An integrated 4-axis gantry handling system performs fully automated storage and retrieval operations. When connected to a transport system (e.g. conveyor systems) and vertical lifts, the system enables fast lot storage and immediate access to wafers.

Key Functions and Features:

The ceiling-mounted automation system shifts storage capacity upward and frees valuable cleanroom floor space.
The 4-axis gantry enables fully automated handling and ensures reproducible, high-speed storage and retrieval processes.
The modular design with 3.6 m segments allows scalable system lengths up to approximately 46 m.
Integrated identification via RFID or barcode enables real-time lot localization and host connection to MCS/MES systems.
The use of Filter Fan Units (FFUs) supports permanent operation in high-purity production environments and ensures compliance with ISO 3 cleanroom classification.

Key Benefits at a Glance:

The FlatStocker enables a zero footprint storage strategy in semiconductor fabs and improves cleanroom space utilization without the need to modify existing production processes.

Reduced cleanroom floor space requirements for storage functions.
High system availability through automatic teaching and maintenance access from below.
Scalable capacity to support future fab expansion.
Transparent material tracking via standardized SEMI interfaces.
Mechanical design can be adapted to customer-specific needs and fab layouts.

Typical Deployment Scenarios in 200mm Fabs

The FlatStocker is used in 200mm semiconductor fabs, particularly above process tools as well as interbay and intrabay corridors. Typical applications include WIP buffer storage, provision of wafer cassettes for process steps, and integration as an automated wafer storage system within existing transport and automation infrastructures.

Technical Overview

Handling material: 200mm open cassettes, HA‑200 boxes, SMIF pods.
System length: scalable up to approximately 46 m.
Cleanroom classification: ISO 3.
Throughput: dependent on system configuration.

Download FlatStocker Product Sheet [pdf]

Discuss Your Storage Requirements with Fabmatics

For project-specific system design and integration of the FlatStocker automation system into existing fab infrastructures, Fabmatics provides technical consulting and engineering support. Please contact us for more details and project‑specific classification within your fab layout.