Overview of storage systems

Stocker Systems

FlatStocker by Fabmatics

FlatStocker

Storage of material carriers e.g. wafer cassettes and H200 boxes where floor space is limited

FlatStocker

Zero Footprint Storage

ZFS (Conveyor)

Space-saving storage underneith the cleanroom ceiling with Zero Footprint Storage from Fabmatics

ZFS (Conveyor)

 

Racks

RFID shelf for semiconductor industry to store carrier boxes

RFID Rack

Products will be identified when placed and become subsequently traceable stored

RFID Rack

 

Purge Systems

FOUP Purge System

FOUP Purge System

Retrofittable Purge System reliably protects wafers between process steps

FOUP Purge System