Overview of storage systems

Stocker Systems

FlatStocker installation with storage bins

FlatStocker

Storage of material carriers e.g. wafer cassettes and H200 boxes where floor space is limited

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Zero Footprint Storage

ZFS (Conveyor)

Space-saving storage underneith the cleanroom ceiling with Zero Footprint Storage from Fabmatics

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Racks

RFID shelf for semiconductor industry to store carrier boxes

RFID Rack

Products will be identified when placed and become subsequently traceable stored

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Purge Systems

ZFS Advanced Purge Nest Unit (APNU) für Spectra / A300 FOUP

FOUP Purge System

Retrofittable Purge System reliably protects wafers between process steps

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