HERO Rail – Rail‑Guided Cleanroom Robot (RGV) for Semiconductor Manufacturing
The HERO Rail is a rail‑guided robotic system (RGV) by Fabmatics designed for cleanroom environments in the semiconductor industry. It fully automates the loading and unloading of process tools and ensures fast, safe transport of wafer cassettes between process tools and transport systems – reliably operating 24/7.
Automated Cleanroom Processes
The HERO Rail was specifically developed for ultra‑clean production environments. It automatically loads and unloads process tools and efficiently transports carriers within the production line. This reduces manual intervention and significantly increases process safety in the cleanroom.
HElp RObot – Safe human‑robot interaction
The HERO Rail combines an advanced robotic system with an innovative rail‑guided drive unit.
A key development focus was safe and intuitive human‑robot interaction: operators and robots work together in a shared environment in a coordinated manner – ergonomic, safe, and efficient.
Reliable 24/7 Operation in Semiconductor Fabs
Worldwide, the HERO Rail is used as an integral part of automated material flow systems in semiconductor fabs. Thanks to its robust design, it operates 24 hours a day, 7 days a week, making a significant contribution to:
- reduced cycle times
- increased tool utilization
- stable and reproducible production processes
Technical Specifications
| Size: | 850 x 600 x 2,350 mm |
| Weight: | 230 kg |
| Work height: | 900 – 1,200 mm |
| Work area: | Flexibly adjustable |
Contact our team - we’d be happy to advise you on the best way to integrate HERO Rail into your factory.
