These handling systems for EUV-Reticles by Fabmatics fulfill requirements like reliablitiy and cleanliness in EUV-Reticle handling.
High Cleanroom Quality Handling
As a special lighting technology used to manufacture high-end microelectronic construction elements, EUV technology sets the highest standards for reliability and cleanliness when handling EUV reticles. Fabmatics solutions comply with these standards. Handling systems for EUV reticles are available as stand-alone devices, e.g. as reticle sorters, and as equipment-front modules, e.g. as loading systems. An Fabmatics load port for RSP pods and dual pods, a wide range of detection modules, grippers and flip equipment are important components here.