Overview of handling systems

Carrier Handling

Carriergripper 200

Carrier Gripper

Automated carrier handling system enables handling on existing tools

Carrier Gripper

LUNA

ACH-LUNA

Classic robotic cell for automated machine loading and unloading of carriers

ACH-LUNA

 

Wafer Handling

 

Reticle Handling

Reticle Gripper

Reticle Gripper

Gripper system for save automated handling of single reticle masks

Reticle Gripper

EUV-Reticle-Handling

EUV-Reticle-Handling

High cleanroom quality for EUV-Lithography reticle handling by Fabmatics

EUV-Reticle-Handling

 

Handling Tools

FOUP Opener

FOUPopener

Manual instrument to open and lock 300mm FOUPs with two hands

FOUPopener

EASYopen

Manual instrument to open and lock 300mm FOUPs using one hand

EASYopen