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Connect
your
potential.

A first-class conductor can lead every ensemble to new heights.









This also applies to your production lines. In combination with complementary components, they run at top form. We ensure the right pace.
With powerful material flow automation for chip factories and plant manufacturers. Our Solutions

Product news! Meet the HERO Scout – Automated handling and transporting of reticle pods >>>

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your
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Automated material handling solutions for semiconductor factories and equipment manufacturers.



As a factory manager you are responsible for running production efficiently.

For more profit

Benefits for factory managers

As a project manager you must implement automation projects in due time, at defined costs and in best quality.

For less stress

Benefits for project managers

As an equipment manufacturer you are the specialist for developing new systems.

For more innovation

Benefits for equipment suppliers

Connect
your
potential.

Our instruments for a
perfectly harmonizing orchestra.


Our Products



HERO Scout Reticle Transport and Handling

HERO Scout

Mobile robot for the most flexible and safe reticle transport and handling

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Test Wafer Center Exterior View

Test Wafer Center

All-in-one-solution for the automated management of test wafers

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Advanced mobile robot for transportation and handling of reticle pods

HERO Scout

Mobile robot for flexible and safe reticle transport and handling

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Cube Stocker

CubeStocker

Floor-based, automatic storage system with its own cleanroom atmosphere

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The HERO ® FAB 200 with four buffers for SMIF pods

HERO®FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

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FAB-LIPS

FAB-LIPS

Real-time locating system for indoor positioning of batches in semiconductor factories

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RFID Applications

Our sample applications for an efficiency-increasing use of RFID solutions

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Three RFID antennas for automated product identification in clean rooms.

RFID Accessories

Components for expanding and modernizing your existing RFID system

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RFID reading station

RFID Reading Station

Identification of wafer cassettes, boxes and other types of material carriers

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RFID CAN/ETH gatewaý in three versions.

RFID Gateway CAN2WEB

Reliable connection between the CAN bus devices and your own network

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RFID Reader HF-1356-SER

RFID Reader HF-1356-SER

With serial interface for easy connection with almost every type of production equipment

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RFID Reader HF-1356-CAN

RFID Reader HF-1356-CAN

High frequency expert for bulk reading of large amounts of data at high speed

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RFID reader LF-134-SER

RFID Reader LF-134-SER

The serial interface is able to connect to practically any production equipment

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RFID Reader LF-134-CAN

RFID Reader LF-134-CAN

The integrated CAN bus interface enables simple networking between multiple devices

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ZFS Advanced Purge Nest Unit (APNU) for Spectra / A300 FOUP.

FOUP Purge System

Retrofittable Purge System reliably protects wafers between process steps

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RFID shelf for semiconductor industry to store carrier boxes

RFID Rack

Products will be identified when placed and become subsequently traceable stored

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Zero Footprint Storage

ZFS (Conveyor)

Space-saving storage underneith the cleanroom ceiling with Zero Footprint Storage from Fabmatics

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FlatStocker installation with storage bins

FlatStocker

Storage of material carriers where floor space is limited

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Fabmatics GmbH

Slim Load Port

Slim input/output station for manual access at any location of the factory

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Smart Load Port

Smart Load Port

Input/Output station with two ports and operator GUI for manual access

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Roller conveyor with turntables and lifts for wafer transport on two levels

Conveyor System for Cleanroom Production

Automated conveyor system for clean rooms.

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RFID trolley for the cleanroom

RFID trolley

Ideal logistics solution for fab areas where automatic transport is not possible or necessary

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hero-rail-rgv-cleanroom-fabmatics

HERO Rail

Rail-guided transport and automated handling system for wafer cassettes

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The HERO ® FAB 200 with four buffers for SMIF pods

HERO Fab

Mobile robot system for quick transport and automatic handling of wafer cassettes

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FOUP Opener

FOUPopener

Manual instrument to open and lock 300mm FOUPs with two hands

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Reticle Gripper

Reticle Gripper

Gripper for safe and reliable handling of individual photomasks

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Active Mask Gripper in the Cleanroom

EUV-Reticle-Handling

High cleanroom quality for EUV-Lithography reticle handling by Fabmatics

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EASYload with wafers loading a carrier

EASYLOAD

Transfer system for 200mm and 300mm wafers

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Wafergripper 450mm

Wafer Gripper, 100 to 450 mm

Gripper system for automated handling of single wafers in various sizes

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Carriergripper 200

Carrier Gripper

Automated carrier handling system enables handling on existing tools

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LUNA - Classic robotic cell for automated machine loading and unloading of carriers

ACH-LUNA

Classic robotic cell for automated machine loading and unloading of carriers

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Connect
your
potential.

To be an excellent conductor requires extensive expertise and many years of experience.


Fabmatics is an experienced specialist for the automation of material flows and handling processes in the semiconductor industry and other high-tech production environments. Founded in 1991, the company has been successfully implementing customer-specific automation projects for customers in the semiconductor industry for more than 30 years, helping to make their production more efficient, faster and safer.


About Fabmatics

News

semicon-japan-2024-teaser

Meet Fabmatics at SEMICON Japan 2024

Meet us at the German Pavilion at SEMICON Japan in Tokyo. Discover Fabmatics' field-proven, comprehensive fab automation solutions.

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fabmatics-handelsblatt-mittelstand-ranking-2024

Fabmatics Ranked Among Germany's 100 Fastest-Growing SMEs in 2024

Fabmatics has been recognized as one of the 100 fastest-growing SMEs in Germany by Handelsblatt and Munich Strategy.

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SEMICON Europa 2024

Meet Fabmatics from November 12 to 15, 2024 at the most important trade fair for the European semiconductor industry at Messe München.

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Contact


Location Europe:
Dresden

Fabmatics GmbH
Zur Steinhöhe 1
01109 Dresden
Germany

Phone: +49 351 65237-0

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Location USA:
Utica

Fabmatics USA Inc.
326 Broad St., Suite 1
Utica, NY 13501
USA

Phone: +1 315 316 1480

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