AMR for Reticle Transport and Handling in the Cleanroom

The HERO Scout is a state-of-the-art mobile robot, specifically designed for flexible transportation and secure handling of reticle pods in semiconductor manufacturing and cleanroom environments. Equipped with an innovative 6-axis cobot, the HERO Scout effortlessly manages the loading and unloading of mask load ports at different heights. As the smallest cleanroom-compatible autonomous mobile robot on the market, it impresses with its ultra-clean quality and maximum reach. Discover the future of safe reticle pod transport with the HERO Scout – your solution for efficient and reliable production in the semiconductor industry.

Key Features & Benefits

  • Compact Size: Minimum footprint enables operation in narrow aisles and fab areas.
  • Long Reach: The 6-axis precision cobot arm is ideal for loading high, ergonomically challenging positions.
  • Flexible Operation: HERO Scout autonomously navigates with 3D cameras for obstacle detection and bypassing, providing both track-bound & freeroaming driving options to meet the most diverse production needs.
  • Safety First: Reliable sensors ensure safe operation in environments where humans and machines work closely together.
  • Fast Deployment: Short setup with SLAM and auto-teaching, minimal adjustments to production changes, and “auto-gripping” enable rapid re-engagement after maintenance, reducing downtime.
  • Cleanroom Compatibility: ISO 2 certified.

AMR Specifications

  • Dimensions (length x width x height): 660 x 580 x 1,360 mm (without robot)
  • Reach of robot: 200 – 1,700 mm
  • Weight: 230 kg
  • Speed: Max. to 1.4 m/s
  • Floor inclination (ramps): up to 6%
  • Payload robot: Up to 10 kg
  • more specifications