Product Overview

Wafer Handling Fabmatics

Handling

Systems for the handling of wafers, reticles and carriers in the semiconductor industry as well as of substrates in microelectronics and nanoelectronics

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Mobile Robot HERO FAB omni-directional driving

Transport

Automation through the use of stationary conveyor solutions as well as mobile and free-moving robotic systems

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FlatStocker installation with 200 storage bins at Frauenhofer IMPS Dresden

Storage

From automated systems for space-saving storage to RFID racks and purge systems

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RFID readers during assembly and cleaning

Identification

Reliable identification of batches in real-time by using RFID solutions

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