Product Overview

Wafer Handling Fabmatics


Systems for the handling of wafers, reticles and carriers in the semiconductor industry as well as of substrates in microelectronics and nanoelectronics

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Automated Guided Vehicle (AGV) HERO FAB in the cleanroom handling and transporting wafers together with an operator


Automation through the use of stationary conveyor solutions as well as mobile and free-moving robotic systems

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FlatStocker installation with 200 storage bins at Frauenhofer IMPS Dresden


From automated systems for space-saving storage to RFID racks and purge systems

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RFID readers during assembly and cleaning


Reliable identification and localization of production lots in real time

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