Purge systems that reliably protect your wafers and secure your fab's yield in the long term.
Modern semiconductor processes are more sensitive than ever to environmental influences. While wafers wait between process steps in FOUPs or SMIF pods, even brief exposure to humidity, oxygen, or chemical molecules can lead to oxidation, surface damage, and yield losses.
Purge Systems – With Nitrogen to higher yield
Our purge solutions create a controlled, stable atmosphere for your intermediate storage and transport processes, actively protecting the value of each individual wafer.
The focus: maximum process reliability, maximum yield, and complete traceability.
Wafer Pod Purge Systems
Our retrofittable wafer pod purge solutions create a controlled environment inside the pod and effectively protect wafers from contamination and unwanted reactions.
Optimized for integration into existing systems - such as wafer storage areas (stockers, diebanks, cabinets, racks, OHB systems, trolleys, Qualification FOUPs etc.) - they are flexible, efficient, and reliable.