Wafer Pod Purge System
Reliable Wafer Protection During Interim Storage
As semiconductor manufacturers push the boundaries at 28 nm and below, controlling airborne molecular contamination (AMC), humidity, and oxidation during wafer handling becomes increasingly critical. In order to tackle this challenge, the Fabmatics Purge System for FOUP and SMIF pods ensures a controlled environment for wafers stored in pods between process steps — mitigating chemical reactions and surface defects that can reduce yield.
Unlike purgeable loadports that only operate while the FOUPs or SMIF pods are docked to process tools, our solution delivers a continuous inert gas (e.g., nitrogen) purge at any storage location. As soon as a pod is positioned in the purge nest, the system begins gas delivery, and it automatically stops once the pod is removed. Consequently, wafers remain protected during the entire interim period without interruption.
Key Benefits
- Reduces wafer defects and yield loss
by preventing airborne molecular contamination (AMC) and oxidation during storage - Extends production flexibility
by allowing longer queue times between process steps without contamination risk - Improves overall yield
through continuous wafer protection in non-active storage locations - Lowers operational costs
with durable, low-maintenance components designed for long-term use - Protects your existing infrastructure investment
by retrofitting seamlessly into current FOUP/SMIF pod storage systems like Zero Footprint Storage - Maximizes cleanroom efficiency
with a compact design that requires no additional floor space - Ensures full process visibility and control
via intelligent web-based monitoring and optional HSMS integration
General System Design
Features
Retrofittable Design
- Can be retrofitted into existing FOUP/SMIF pod storage systems (e.g. Zero Footprint Stocker) without changes to fab infrastructure
- Installation possible during ongoing fab operations
Space-Saving Integration
- Purge nests are integrated into existing storage bins
- Slim, lightweight, and modular design – no additional floor space required
Flexible Installation & Servicing
- APNU modules can be installed in rows, isles, or matrix layouts
- Quick and simple servicing of individual modules
High Purity Operation
- Advanced purge interface ensures inert gas purity and system durability
- Each APNU includes an individual particle filter
Intelligent Control Software
- Independent purge functionality per nest (no cross-contamination or gas waste)
- Real-time gas flow monitoring via back pressure sensors
- Customizable purge intervals using purge profiles
- Web-based Service GUI for configuration and diagnostics
- Optional: Continuous quality monitoring with Advanced Qualification FOUP
- Control system based on embedded Linux
- Optional HSMS interface (SEMI E88 compliant)
Quiet Operation
- Silent, noise-free purge under all operating conditions
Typical Application Scenarios for Wafer Pod Purge Systems
- Zero Footprint Storage (ZFS)
- Overhead Buffers (OHB)
- Custom Stocker purge solutions available upon request
Possible Adaptions
- For other wafer sizes, e.g. SMIF Pods (200mm)
- For Matrix Frame Storage (Stocker, Racks)
- For Zero Footprint Storage (OHT)
Field-Proven in Global Semiconductor Fabs
We have retrofitted more than 9,500 Zero Footprint Storage bins in 300mm fabs with our FOUP Purge System – significantly improving yield and enabling longer idle times before processing.
Over 800 Matrix Frame Storage (MFS) stocker bins have also been upgraded to serve as Work-In-Progress (WIP) intermediate storage with reliable purge functionality.
At another fab, we have equipped nearly 9,000 shelf storage locations with long-term purge units – optimized for low gas flow and post-process wafer storage.
Want to Learn More?
Ensure reliable, clean wafer storage without costly infrastructure changes. Contact our team to explore a tailored FOUP/SMIF Pod Purge solution for your fab.
