Automated Wafer Transfer

EASYload was developed for the easy automated transfer of wafers between two carriers, eliminating the time-consuming manual wafer handling.

The following transfer processes can be realized with the EASYload:

  • 200mm wafers between two open 200mm wafer carriers
  • 300mm wafers between two FOUPs
  • 200mm wafers from open 200mm wafer carrier to 300mm FOUP with matching insert and vice versa

Specifications:

Size:930 x 500 x 1,210 mm
Weight:approx. 100 kg
Clean room category:ISO 3 (1 with FFU)
Stroke:360 mm
FOUP lift:6 mm
Operation:Semi-automatic