Automated FOUP Loading
When it comes to seamlessly loading and unloading 300-mm wafer FOUPs, the device you need is EASYload. Simplify various support tasks for the 300-mm wafer technology.
The EASYload300-200 also allows you to simultaneously load and unload 200-mm wafer carriers and 300-mm wafer FOUPs.
|Size:||930 x 500 x 1,210 mm|
|Weight:||approx. 100 kg|
|Clean room category:||ISO 3 (1 with FFU)|
|FOUP lift:||6 mm|