Help Robot in the cleanroom
The HERO®Rail combines a new robot system with an innovative drive unit. It is designed to fully automatically load and unload process tools, and enable fast transportation between process tools and the transport system in the cleanroom. The main focus and challenge lie in the interactive co-operation between human and machine – operator and robot.
Reliable and robust, the HERO®Rail operates 24 hours a day, 7 days a week in the cleanrooms of semiconductor factories worldwide. As an integral part of an overall system for the fully automated production flow of wafers, it ensures throughput time savings and higher plant utilization.
|Size:||850 x 600 x 2,350 mm|
|Work height:||900 – 1,200 mm|
|Work area:||Flexibly adjustable|