The HERO® combines a new robot system with an innovative drive unit. It is designed to fully automatically load and unload process tools, and enable fast transportation between process tools and the transport system in the cleanroom. The main focus and challenge lie in the interactive co-operation between human and machine – operator and robot.
|Size:||850 x 600 x 2,350 mm|
|Work height:||900 – 1,200 mm|
|Work area:||Flexibly adjustable|