Smart Load Port
The Smart Load Port by Fabmatics is a dual-port input/output station that provides simple and fast manual access to 300mm FOUPs, 200mm SMIF pods or RSP Reticle wafer pods in fully automated semiconductor factories.
Secure wafer carrier handover with automated identification (RFID)
The RFID-based Smart Load Port is a station that enables secure and efficient manual transfer of wafer carriers like 300 mm FOUPs, 200 mm SMIF pods and RSP reticle pods into and out of Overhead Transport Systems (OHT) in semiconductor fabs.
Thanks to its integrated RFID technology, the Smart Load Port automatically identifies production lots during loading and unloading. This ensures traceability and supports seamless integration into fab automation workflows.
The Smart Load Port connects directly to the MES/MCS system, enabling automatic specification and routing of production lots to the next process step. Operators can also interact manually via a user-friendly GUI touchscreen, placing orders and receiving feedback directly from the host system.
Key Features & Benefits:
Dual-port design
- Each Smart Load Port includes two handling stations
RFID identification
- Each port equipped with a 134.2 kHz RFID reader
Integrated GUI touchscreen
- Operators can place orders and receive host feedback
Host interface
- Communication via SOAP/XML with MES/MCS
SEMI E84 interface
- For handshake with OHT vehicles
Optional second E84 interface
- For AGV integration
Supports multiple pod types
- FOUP, FOSB, SMIF, RSP
Flexible placement
- Install wherever OHT access is available
Secure handover
- Automated lot tracking and process step assignment
