Flexible, Space-Saving Pod Access for Semiconductor Fabs

Slim Load Port Manual handling FOUPThe Slim Load Port by Fabmatics is a compact and mobile input/output station designed for manual wafer pod handling in highly automated semiconductor fabs. It enables operators to access production lots exactly where needed – without delays or detours.

In conventional fab environments, manual access to wafer pods often involves long waiting times due to their storage in peripheral areas. The Slim Load Port solves this by providing direct access at any location within the fab, ensuring fast and reliable manual input/output of pods.

Whether for short-term testing, measurements, or in case of Overhead Transport System (OHT) interruptions, the Slim Load Port offers a flexible solution. It can be deployed temporarily or installed preventively along production lines to guarantee continuous access. Additionally, it supports tool simulation for OHT workflows.

Key Features & Benefits:

Slim and Lightweight Design

  • Fast and easy installation – minimal setup effort
  • Easy to move – easy to relocate and ideal for space-constrained environments
  • Small footprint – maximizes flexibility in fab layout

SEMI Standard Conformant

  • Works with every Overhead Transport System (OHT)
  • Maintains FOUP distances according to the SEMI standard (505 mm) when the load ports are chained “edge-to-edge”
  • Available for multiple pod types: FOUP / FOSB, SMIF, RSP150

Interfaces & Connectivity

  • Simple MES/MCS interface for fab integration
  • Built-in RFID reader (134.2 kHz)
  • Built-in SEMI E84 interface for seamless handshake between Load Port and OHT vehicle

Typical Use Cases

  • Temporary FOUP access during OHT downtime
  • Manual handling for test lots and measurements
  • Preventive installation at production lines
  • Simulation of tool access in automated transport systems