Robots in the clean room
Our systems for the handling of wafers, reticles and carriers in the semiconductor industry, as well as for similar substrates in micro and nanoelectronics make manual intervention superfluous.
Overview of handling systems
Carrier Handling


Wafer Handling


Wafer Gripper, 100 to 450 mm
Gripper system for automated handling of single wafers in various sizes
Reticle Handling

EUV-Reticle-Handling
High cleanroom quality for EUV-Lithography reticle handling by Fabmatics

Mobile Robots


Handling Tools
