Why Reticle Logistics Matters in Lithography

Lithography is the most critical and capital-intensive area of semiconductor manufacturing. Reticles, also called photomasks or masks, are the heart of the lithographic production process. As master templates for chip design, they rank among the most valuable assets in a fab. Yet, their management often receives less attention than it deserves.

With thousands of reticles in circulation and up to 50 exposure layers per product, manual processes introduce contamination risks, inefficiencies, and costly delays. Even a minor scratch or mix-up can silently compromise entire wafer lots before the issue is detected.

To tackle these challenges, Fabmatics and SCI have joined forces to deliver a fully integrated automation solution for reticle handling, transport, storage, and retrieval.

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HERO Scout and SCI Linear Stocker: A Powerful, Field-Proven Combination

HERO Scout – Automated Handling & Transport

Fabmatics’ autonomous mobile robot guarantees safe, clean, and efficient movement of reticle carriers across the fab. HERO Scout is designed for ISO-compliant environments and integrates smoothly into both legacy and modern infrastructures. It supports direct tool loading and enables contamination-free transport.

 

SCI Linear Stocker – High-Density Storage & Fast Retrieval

SCI’s high-density stocker system with up to 3.000 RSP-slots, provides secure, vibration-free storage for various reticle pod types. The Linear Stocker offers ISO Class 4 compliance, SEMI-standard interfaces, and vibration-free transport for optimized material flow and fast retrieval.

Together, these systems create a full-stack solution that delivers:

  • Contamination-free transport and storage
  • On-time reticle availability at the stepper
  • Maximum uptime and throughput
  • Centralized control and MES integration
  • ISO-compliant design and SEMI-standard connectivity

As part of the SCIO Group’s Cleanroom Technologies segment, Fabmatics and SCI leverage shared expertise and innovation to help fabs reduce downtime, improve yield, and optimize personnel resources.

Discover how Fabmatics and SCI are redefining lithography automation with integrated solutions for reticle logistics and beyond.

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