About the Mask and Lithography Conference 2023

The EMLC Conference annually brings together scientists, researchers, engineers and technicians from research institutes and companies from around the world to present their latest findings in mask and lithography techniques. The EMLC 2023 conference is dedicated to research, technology and related processes. It provides an overview of the current state of mask and lithography technologies and future strategy. Here, mask manufacturers and users have the opportunity to familiarize themselves with the latest developments and results.

Fabmatics presents solutions for handling masks

Meet our experts in the exhibition area during EMLC 2023. Our products for handling masks extend our many years of experience with handling systems for wafers to include the even more demanding transport of blank masks. The resulting high-end products consistently meet the requirements for cleanliness according to ISO 1 (according to ISO 14644-1).

Our portfolio in the area of mask handling automation

  • Loadports and Pod Opener
  • EFEMs
  • Mask Grippers
  • Mobile Robots
  • Identification & Tracking Systems
  • Storage & Purge Systems

Learn more: www.fabmatics.com/products/handling


June 19-21, 2023


Hilton Dresden
An der Frauenkirche 5
01067 Dresden

More information: www.emlc-conference.com