Flexible Integration for Multi-Loadport Systems

Operating at 134.2 kHz, this LF RFID read/write device supports up to four antennas and four sensors, making it ideal for equipment with multiple loadports or identification points. With SEMI-compliant SECS-II communication via HSMS, the reader integrates seamlessly into MES landscapes and production tools.

Setup and testing are simplified through a browser-based interface, allowing quick access to the integrated web server. The internal transceiver complies with the TIRIS standard, supporting both reading and writing of conventional LF transponders.

One of the standout features is the automatic RFID read triggering via sensor input, eliminating the need for host-side intervention. This significantly reduces cabling and mounting effort, making the LF-134-ETH-MUX4 a cost-effective and efficient retrofit option for existing semiconductor tools.

RFID in the Cleanroom: The Foundation of Semiconductor Automation

In semiconductor fabs, digital identification is the first step toward automation. RFID enables real-time tracking of wafer carriers and lots, reducing manual errors and unlocking process transparency. Whether upgrading legacy 200 mm fabs or building new 300 mm lines, RFID lays the groundwork for scalable, smart intralogistics.

Fabmatics’ RFID solutions are designed for cleanroom compatibility, SEMI standards, and flexible integration. With over 30 years of experience in automation, Fabmatics supports fabs worldwide in transitioning from manual workflows to fully digital, automated environments.

Key Features of the Multiport RFID Reader LF-134-ETH-MUX4

  • 4 antenna connections
  • Supports up to 4 NPN, PNP or Push-Pull sensors (M8 standard)
  • SECS-II protocol support
  • Integrated webserver for setup and diagnostics

Benefits

  • Lower investment costs
  • Reduced cabling complexity
  • Minimal installation effort
  • Automatic reading without host interaction
  • Standardized interfaces and components

Whether you’re upgrading legacy systems or designing new multi-loadport systems, the LF-134-ETH-MUX4 offers a robust and scalable solution for modern semiconductor manufacturing.

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