Flexible purging with manual access

The Slim Purge Load Port reduces long waiting times, because it provides manual access to the FOUPs exactly where it is needed, namely wherever the operator requires it for his work. During these waiting times while wafers are waiting for the next process step, the danger of unwanted side reactions is very high.

To avoid oxidations and other chemical reactions on the wafer surface, Fabmatics is able to purge the FOUP with an inert gas during interim storage.

Slim Purge Load Port allows to purge FOUPs at flexilbe stations at any location of the factory.

Features:

Slender design and flexible use
  • Fast and easy installation
  • Avoid unwanted side reactions on wafer surfaces
  • Small footprint
  • Extension up to four Load Ports
Interfaces
  • Simple MES/MCS interface
  • Built-in RFID reader
  • Built-in SEMI E84 interface for handshake between Slim LP and OHT vehicle