Overview of transport systems

Automated Guided Vehicle (AGV)

HAP-HERO FAB

HAP-HERO® FAB

Mobile robot system for quick transport and automatic handling of wafer cassettes

HAP-HERO® FAB

SCOUT

SCOUT

Autonomously navigating vehicle as the flexible alternative to fixed installed transport systems

SCOUT

 

Rail Guided Vehicle (RGV)

Automated Carrier Handling by mobile robot HERO

HAP-HERO®

Rail-guided transport and automated handling system for wafer cassettes

HAP-HERO®

 

Person Guided Vehicle (PGV)

RFID trolley for the cleanroom

RFID Person Guided Vehicle

Ideal logistics solution for fab areas where automatic transport is not possible or necessary

RFID Person Guided Vehicle

Smart Cart

Smart Cart

Battery-operated cleanroom transport trolley with maximum agility and high load capacity

Smart Cart

 

Conveyor Systems

Cleanroom Conveyor System with lifts and turn tables

IntelliTrack

Roller conveyor system allows most diverse transport containers to be moved throughout the fab

IntelliTrack

 

Loadports

Slim Purge Load Port

Slim Purge Load Port

Flexible input/output station for manual access with purge functionality

Slim Purge Load Port

Slim Load Port mit 300mm FOUP

Slim Load Port

Slim input/output station for manual access at any location of the factory

Slim Load Port

Smart Load Port

Smart Load Port

Input/Output station with two ports and operator GUI for manual access

Smart Load Port