Product Overview

Wafer Handling Fabmatics

Handling

Systems for the handling of wafers, reticles and carriers in the semiconductor industry as well as of substrates in microelectronics and nanoelectronics

Handling

SCOUT mobile robot by Fabmatics

Transport

Automation through the use of stationary conveyor solutions as well as mobile and free-moving robotic systems

Transport

FlatStocker by Fabmatics

Storage

From automated systems for space-saving storage to RFID racks and purge systems

Storage

FAB-LIPS Fabmatics

Identification

Reliable identification and indoor positioning of batches in real-time by using RFID and RTLS solutions

Identification