Automated FOUP Loading

When it comes to seamlessly loading and unloading 300-mm wafer FOUPs, the device you need is EASYload. Simplify various support tasks for the 300-mm wafer technology.

The EASYload300-200 also allows you to simultaneously load and unload 200-mm wafer carriers and 300-mm wafer FOUPs.

Specifications:

Size:930 x 500 x 1,210 mm
Weight:approx. 100 kg
Clean room category:ISO 3 (1 with FFU)
Stroke:360 mm
FOUP lift:6 mm
Operation:Semi-automatic