Automated FOUP Loading

When it comes to seamlessly loading and unloading 300-mm wafer FOUPs, the device you need is EASYload. Simplify various support tasks for the 300-mm wafer technology.

The EASYload300-200 also allows you to simultaneously load and unload 200-mm wafer carriers and 300-mm wafer FOUPs.

Specifications:

Size: 930 x 500 x 1,210 mm
Weight: approx. 100 kg
Clean room category: ISO 3 (1 with FFU)
Stroke: 360 mm
FOUP lift: 6 mm
Operation: Semi-automatic